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Northeast Japan Earthquake Influence on Semiconductor Equipment Manufacturing Vol.16 (Final)

Screen to Enter Market for Semiconductor Wafer Pattern Inspection System

SOKUDO DUO sets productivity world record and >350wph throughput target


   
5. Juli 2009


Sokudo Co., Ltd. (a joint venture company established between Dainippon Screen Mfg. Co., Ltd., and Applied Materials, Inc.) announced today that its revolutionary SOKUDO DUO coat/develop track platform has been running at a customer site at 300wph during lithography processing, the industry’s highest track system throughput.

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PR090507_E.pdf51 K
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