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Simultaneous Achievement of World’s Best Productivity and Clean Level.

Dainippon Screen Mfg. Co., Ltd., today announced that it has developed the SU-3200, a single wafer cleaning system* that delivers the world’s highest throughput** of a maximum 800 wafers per hour and the world’s best clean level** in cleaning chambers for silicon semiconductor wafers. The new system will go on sale from December 2010.

SU-3200

Recently, some semiconductor industry manufacturers have already begun full-scale mass production of devices with a circuit line width of 32 nanometers, and steady progress is being made in the development of device technology for the 22 nanometer process and beyond. As a result, in cleaning processes, which account for the majority of pattern formation processes, there is a rapidly growing need for single wafer cleaning systems capable of higher levels of throughput and miniaturization.

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